A high vacuum pump is a type of vacuum pump that operates in the high vacuum range, typically creating vacuums with pressures lower than 0.005 MM Of HG. These pumps are crucial in applications where a very low pressure or near-absolute vacuum is needed, beyond what standard pumps (like rotary vane or diaphragm pumps) can achieve.
Types of High Vacuum Pumps:
Rotary Vane Pumps (in combination):
- While they typically operate in the rough or medium vacuum range, rotary vane pumps are often used as a pre-pump in combination with a high vacuum pump (like a turbo molecular pump or diffusion pump) to first reduce the pressure to a level where the high vacuum pump can take over.
Turbo Molecular Pump:
- A turbo molecular pump uses a series of rapidly rotating blades (rotors) to impart momentum to gas molecules, directing them toward an exhaust. These pumps are effective at creating very low pressures and can achieve vacuum levels in the range of 10⁻⁷ to 10⁻¹⁰ Torr.
- Advantages: High pumping speeds, precise control, and no oil contamination (oil-free).
- Applications: Used in semiconductor manufacturing, mass spectrometry, and high-energy physics research.
Diffusion Pump:
- A diffusion pump uses a high-speed jet of vapor (typically oil or mercury) to trap gas molecules and carry them to the exhaust. These pumps are known for achieving ultra-high vacuum levels, typically in the range of 10⁻⁶ to 10⁻¹² Torr.
- Advantages: Capable of achieving extremely low pressures; simple design.
- Disadvantages: Requires a fore-pump (typically a rotary vane pump) and may result in contamination of the system with the oil used for vapor.
- Applications: Commonly used in research laboratories, particle accelerators, and high-energy physics experiments.
Ion Pumps:
- Ion pumps work by creating a strong electric field to ionize gas molecules, which are then captured on the pump's electrodes. These are particularly useful in ultra-high vacuum (UHV) applications, often reaching pressures in the range of 10⁻¹¹ Torr or lower.
- Advantages: No moving parts, extremely low pressure, and contamination-free.
- Applications: Common in scientific experiments like electron microscopy, synchrotron radiation facilities, and vacuum chambers for ultra-sensitive research.
Cryopumps:
- Cryopumps operate by cooling surfaces to very low temperatures, causing gas molecules to condense and freeze onto the surfaces. Cryopumps are capable of achieving ultra-high vacuum and are often used in combination with other pumps (like turbo molecular pumps) in UHV applications.
- Advantages: Very high pumping speeds, especially for gases like nitrogen, oxygen, and water vapor.
- Disadvantages: They require periodic regeneration and maintenance, as the surfaces eventually warm up due to the trapped gas.
- Applications: Used in semiconductor processing, vacuum coating, and scientific research.